The GX Dry Vacuum Pump Series sets new standards for zero maintenance between majoroverhauls. Improved efficiency lowers the cost of ownership and provides continuouspumping duty throughout the pressure range.gx

GX pumps are available in a wide range of peak speeds and variants to addressapplications from clean through to medium-duty processes. A modular design allows usersto configure GX drypumps to suit individual fab requirements. An ultra-compact footprintallows installation options including on-tool, close proximity, or remote.

Features & Benefits

- Reduced Cost of Ownership

- Up to a 50% reduction in utilities cost compared to iL/iHdrypumps

- No preventative maintenance

- Flexible Installation Options

- Small and light for easy installation


- Load Lock

- Transfer

- Metrology

- Lithography


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PVD Process

Models Available

GX100L, GX100TI, GX100N

GX600L, GX600N


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